Hi:
We are using a laser optical system to measure the deflection of the
bimetallic cantilever beams. We are not using the interferometer  method.
Our output signal is a voltage from the PSD(Position Sensitive Dectector),
and we would like to know how much does the cantilever beam deflect.

Does anyone have such experience to calibrate this kind of measurement?
I would appreciate any suggestions.

OR some advice on how to measure the deflection of the bimetallic
cantilever beam(say, a 100um X 50um cantilever).

Thanks,
Junhua Wu