Dear MEMS people Could you tell me what the density of LPCVD polysilicon is ? I much appreciate that. Have a good day. Sincerely, Dung-An Phone: Office: (734) 615-0303 Home : (734) 662-1553 Address: Office: Home: University of Michigan 411 Longshore Dr. Department of Mechanical Engineering Ann Arbor, MI 48105 3007 EECS, 2350 Hayward U.S.A. Ann Arbor, MI 48109-2125 U.S.A. E-Mail: wangd@engin.umich.edu Homepage: http://www-personal.engin.umich.edu/~wangd