Hi, everyone!
I need this paper:
    Komvopoulos, K.,"Challenging Issues in Microelectromechanical
Systems",  Proceedings of MEMS Symposium, 1998 ASME Winter Annul
Meeting, Anaheim, CA.
And any papers about material mechism in MEMS!
Thank you very much!

zhengwei

zw@itsvr.sim.ac.cn