I suggest you try 3:1:: H2O:Aqua regia.  The latter is 3:1:: HCL:HNO3.  You
might try heating to 50 degrees C.  Good luck.  Bob

-----Original Message-----
From: Kong Lingbing (Dr) 
To: MEMS@ISI.EDU 
Date: Tuesday, April 06, 1999 9:50 PM
Subject: wet etching of Pt


>Dear All,
>I am urgently looking for an effect method (preferly wet) to etch electrode
>platinum (Pt) on silicon substrate with a thin layer of Ti. Would you
please
>give me help?
>Best regards.
>
>________________________________________________________________
>Dr Kong Lingbing
>School of EEE
>Nanyang Technological University
>Block S1, Nanyang Avenue
>Singapore 639798
>
>Tel: (65) 7906084
>Fax: (65) 7933318
>Email: elbkong@ntu.edu.sg
>________________________________________________________________
>