Message text written by INTERNET:mems-cc@ISI.EDU
>I would be very interested in
any first hand observations or recommendations for using Ag (or Au), before
I try it myself.

I have spent much of the last two days searching for an answer to this
question with little luck.  Are there any good references that summarize
etch rates for potential masking materials in various etchants,
particularly
metal masks?  One very nice table of several common ones was compiled by
Kirt Williams,
Unfortunately this doesn't have the specific info I need.<

Hi Marc--

Heck, I could have spent another year checking etch rates of
Cr, Au, Ti, Cu, Ni, etc., etc.!
I am keeping track of any more data I get
and will tabulate them when I get enough.

As far as silver goes, I don't know.
Please tell me if you find anything out.

Gold with a chromium adhesion layer has been used as aTMAH etch mask
(and for self-biasing) for Si.
See C. Ashruf et al., Transducers '97, p. 703-706.

Au/Cr is listed as a mask for KOH in Marc Madou's book on p. 172.

Go Bears,
        Kirt

**********************************************
Kirt R. Williams, Ph.D.
Research Staff Scientist
Lucas NovaSensor
1055 Mission Ct., Fremont, CA  94539-8203  USA
Kirt_Williams@compuserve.com
(510) 661-6147  FAX (510) 770-0645
**********************************************