durusmail: mems-talk: Isotropic Si etching with high etching rate
Isotropic Si etching with high etching rate
1999-04-29
Isotropic Si etching with high etching rate
Mario Adamschik
1999-04-29
I am searching for a etchant for high rate isotropic
Si etching.
I want to thin a 200 micron wafer to 100 micron.

Thank to all in advance
Mario


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