May be this paper may be of interest to you: Author: C. Marxer, M.-A. Gretillat, N.F. de Rooij, O. Anthamatten, R. Baettig, B. Valk, P. Vogel Title: "Reliability Considerations for Electrostatic Polysilcion Actuators Using as an Example the Remo-Component" Journal / Proceeding: Sensors and Actuators A, Vol. A61, No 3, pp. 449-454, 1997 C. Marxer Christophe Gorecki wrote: > Dear MEMS collegues: > I research the bibliography concerning a general characterisation of > MEMS reliability (parameters to measure/measuring techniques) based on > 1. Improving of the design > 2. Diagnostics during the manufacturing: > 3. Diagnostics during the use. > Does anyone know the publications or web adresses to extract these > informations ? > Thank you very match; > Best regards > C. Gorecki > > -- > ******************************************************************* > Dr. Christophe Gorecki, CNRS Senior Researcher > Laboratoire d'Optique P.M. Duffieux, Faculte des Sciences et Techniques > 16 route de Gray, 25030 Besancon, France > Tel: +33-3-81666594, fax: +33-3-81666423 > e-mail: christophe.gorecki@univ-fcomte.fr >