durusmail: mems-talk: selective etching of Cu (Ag) over alumina
selective etching of Cu (Ag) over alumina
selective etching of Cu (Ag) over alumina
Giovanni Zangari
1999-04-30
Hi all:

I am looking for a way to chemically etch Cu (or Ag) deposited onto
a very thin alumina film (~10 nm) obtained by oxidation in air of a
sputtered Al film.
You understand that the alumina layer should absolutely not be
etched by the etching solution for Cu or Ag. I was thinking of
cyanides, but I have some concerns about the safety. I also don't
know what the laws are about the use of cyanides in the US.

Thanks to all of you,

   Giovanni

===================================================
Dr. Giovanni ZANGARI
Assistant Professor
Dept. of Metallurgical and Materials Engineering
University of Alabama
P.O. Box 870202, 120 Bevill Building
Tuscaloosa, AL 35487
Phone:  (205) 348-7074
Fax:    (205) 348-2164
e-mail: gzangari@coe.eng.ua.edu


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