James Carroll is right. The work done on "reliability" of MEMS devices is
quite limited. The MEMS community currently does not apply methodologies
we are accustomed to seeing in conventional and damage-tolerant structural
design. That said, there is an enormous body of literature on conventional
(ie. macroscale) structural design which must not be overlooked. I would
suggest that people designing safety-critical and high performance MEMS
should start by being well versed in these established approaches.
Fracture, fatigue, creep, and environmental degradation are just a few of
the many phenomena which are issues for both macroscopic and micron-scale
design. Fatigue of structural films has been my research emphasis for the
past several years . However,
we have a long way to go in understanding the behavior of these materials.
Please note that there are efforts at organizations like the ASTM that
address the need for standard test methods and specifications for the
mechanical properties of films .
If you would like more information on these standardization activities,
please let me know.
Regards,
Chris
At 08:28 AM 4/26/99 -0500, you wrote:
>Dr. Gorecki
>
>Alot of the information you are looking for either does not exist, is in the
>embrio stage of research, or is based on a specific component's data (for
>example the accelerometer). Most research being done is on the developing of
>prototype systems not exactly on the reliability of the item. Most that I
have
>talked to say they want to get the design of concept developed first then
they
>will work on the reliability and producability of the item. This is
common with
>new cutting edge technology.
>
>There are very few places that I know of that are doing research on MEMS
>reliability in a semi-general basis. Sandia National Laboratory is probably
>doing the most work at this time. They are in the embrionic stages of
research
>though. Their web page for MEMS Reliability is:
>
> http://www.mdl.sandia.gov/Micromachine/tour.reliability.html
>
>I would start there and maybe even get intouch with personnel. They are also
>planning a MEMS Reliability Short Course in the neart future that might be
>usefull.
>
>
>James Carroll
>Reliability Engineer
>
>____________________Reply Separator____________________
>Subject: Mems reliability
>Author: christophe.gorecki@univ-fcomte.fr
>Date: 4/22/99 10:37 AM
>
>Dear MEMS collegues:
>I research the bibliography concerning a general characterisation of
>MEMS reliability (parameters to measure/measuring techniques) based on
>1. Improving of the design
>2. Diagnostics during the manufacturing:
>3. Diagnostics during the use.
>Does anyone know the publications or web adresses to extract these
>informations ?
>Thank you very match;
>Best regards
>C. Gorecki
>
>--
> *******************************************************************
>Dr. Christophe Gorecki, CNRS Senior Researcher
>Laboratoire d'Optique P.M. Duffieux, Faculte des Sciences et Techniques
>16 route de Gray, 25030 Besancon, France
>Tel: +33-3-81666594, fax: +33-3-81666423
>e-mail: christophe.gorecki@univ-fcomte.fr
>
>
>
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>
Christopher Muhlstein
U.C. Berkeley/LBNL
1 Cyclotron Road
MS 62-203
Berkeley, CA 94720
cmuhlstn@uclink4.berkeley.edu
http://www.lbl.gov/Ritchie/Programs/FILM