--------------5C65AD80A7DF08ABAA7CE177 Content-Type: text/plain; charset=us-ascii Content-Transfer-Encoding: 7bit Dear Dung-An, Another good option for MEMS manufacturing is Integrated Sensing Systems (ISSYS). ISSYS is a commercial MEMS company that provides contract manufacturing and MEMS process steps. In fact, ISSYS has helped customers ranging from single individuals trying to get grants to fortune 500 companies. Among other processes, ISSYS provides: * Anodic Bonding * Deep RIE (STS) * Dicing * EDP etching * Photolithography * Sputtering * Metrology Services (SEM, WYKO) * Misc fabrication processes. You can find out more about ISSYS and the MEMS services that they provide at www.mems-issys.com or by calling Ms. Sonbol Ansari at (734) 547 - 9896 ext. 104. Best of Luck, Randy Grimes At 12:41 PM 4/28/99 -0400, Dung-An Wang wrote: >Hi >Are there other MEMS manufacturers besides MCNC MUMPs? >Your help is really valuable to me. >Thanks a lot. > > Sincerely, > Dung-An > >Phone: > Office: (734) 615-0303 Home : (734) 662-1553 >Address: > Office: Home: > University of Michigan 411 Longshore Dr. > Department of Mechanical Engineering Ann Arbor, MI 48105 > 3007 EECS, 2350 Hayward U.S.A. > Ann Arbor, MI 48109-2125 > U.S.A. >E-Mail: > wangd@engin.umich.edu >Homepage: > http://www-personal.engin.umich.edu/~wangd --------------5C65AD80A7DF08ABAA7CE177 Content-Type: text/html; charset=us-ascii Content-Transfer-Encoding: 7bit Dear Dung-An,Another good option for MEMS manufacturing is Integrated Sensing Systems (ISSYS). ISSYS is a commercial MEMS company that provides contract manufacturing and MEMS process steps. In fact, ISSYS has helped customers ranging from single individuals trying to get grants to fortune 500 companies. Among other processes, ISSYS provides:
Best of Luck,
Randy Grimes
At 12:41 PM 4/28/99 -0400, Dung-An Wang wrote:
>Hi
>Are there other MEMS manufacturers besides MCNC MUMPs?
>Your help is really valuable to me.
>Thanks a lot.
>
> Sincerely,
> Dung-An
>
>Phone:
> Office: (734) 615-0303 Home : (734) 662-1553
>Address:
> Office: &
nbsp; &nb
sp;
Home:
> University of Michigan &nbs
p;
411 Longshore Dr.
> Department of Mechanical Engineering Ann
Arbor, MI 48105
> 3007 EECS, 2350 Hayward &nb
sp;
U.S.A.
> Ann Arbor, MI 48109-2125
> U.S.A.
>E-Mail:
> wangd@engin.umich.edu
>Homepage:
>
http://www-personal.engin.umich.edu/~wangd
--------------5C65AD80A7DF08ABAA7CE177--