Dear MEMS researchers: IntelliSense is seeking anisotropic etching information
for the following etchants:

KOH, TMAH, EDP

The information that we are looking for are the 100, 110, and 111 etch rates as
a function of temperature and concentration (mix). For convenience, the
following table is provided. Please either use the following table, or send us
the complete information in your own format.

Fariborz Maseeh
For IntelliSense Corporation
16 Upton Drive
Wilmington, MA 01887
(508) 988 - 8000
(508) 988 - 8001 fax

Etchant (KOH, EDP, TMAH)
Additive (IPA, etc.)

Temp.            Concentration          Etch rate 100     Etch rate
110    Etch rate 111
(deg. C)          (% by wt. in DIH2O)    (micro/min)       (micro/min)
    (micro/min)