Does anybody have experience with, or know of work on the fabrication of
silicon dioxide membranes/diaphragms in silicon wafers ? Is this possible with
thermally grown oxide 1 micron thick, if the membranes are sufficiently small?

Thank you, Tony Rogers

Applied Microengineering Ltd
68 Milton Park, Abingdon, OXON, OX14 4RX, UK.
Tel: +44 (0) 1235 833 934
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