Hi

I am looking for the piezoelectric coefficients of Polysilicon.
We have already the ceramic coefficients. The Silicon piezoresistive
coefficients are also available through different books.  However, for the
polysilicon which is used successfully in Mems resonators, the piezolectric
coefficents are not available.  Of course  single crystalline silicon as
being  centrosymmetric does not exhibit piezoeletricity.

Does anybody know that coefficients?
Thanks in advance

Nadia Rafat
Cairo University
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