Dear Colleagues,
Does anyone know of  a supplier of commercial quality e-beam plates with
the ability to produce thicker than normal  coatings on 4" square glass
plates. The required thickness of the film of EBR9 or HS31 resist is 1-2
microns, considerably thicker than the standard 0.5 microns offered by
the major suppliers of plates. These are to be used for direct write by
e-beam.  I can supply the glass plates if required.

Thank you,

Patrick Leech,
CSIRO Division of Manufacturing Science and Technology,
Clayton South, Victoria, Australia.