>Does anybody have experience with, or know of work on the >fabrication of silicon dioxide membranes/diaphragms in silicon >wafers ? Is this possible with thermally grown oxide 1 micron thick, >if the membranes are sufficiently small? >Thank you, Tony Rogers > >Applied Microengineering Ltd >68 Milton Park, Abingdon, OXON, OX14 4RX, UK. >Tel: +44 (0) 1235 833 934 >Fax: +44 (0) 1235 833 935 >WWW: http://www.aml.co.uk >e mail: aml@aml.co.uk > It has been my experience that you can easily form small membranes from thermal SiO2. However, they tend to deform from stress and wrinkle.