Hello MEMS Mailing List,

Currently we are looking into putting all of our MEMS processes into a new
reliable, programmable, and professional technology process database for
local usage only. We need predefined masks or process sheets for flow
charts, wafer batches, and wafer tracking, where we could easily enter our
process data/parameters and the users know exactly what steps they have to
run next and where their wafers are at a certain time. Statistics on
equipment usage would also be useful to know.

Do you know of any software that could manage that. We want to limit the
in house software development.

We already have a database program, that has stored all the process
information, but since it is not a relational database program, flow
charts for the users are not feasible and wafer tracking is not available.

Any help and suggestions would be highly appreciated!

Best Regards
Wilfried Noell


***  "There is plenty of room at the bottom." (R. Feynman)  ***

...he was surely not joking.

=========================================================

Dr. Wilfried Noell        Phone: +41 32 7205 548
Institute of              Fax:   +41 32 7205 711
Microtechnology
Tools for Nanoscience
University of Neuchatel   Internet:  http://www-samlab.unine.ch
Rue Jaquet-Droz 1         mailto:    Wilfried.Noell@imt.unine.ch
2007 Neuchatel
Switzerland