Hi there, I'm working on the design and fabrication of a bulk micromachined resonator and I would like to know if there is any special equipmentto perform KOH etches using electrochemical etch stop, specially wafer holders which leave one side open to the etchant while the other is protected and contacted in both the p and n zones. We have built from scratch our own Teflon holder but is quite time&effort expensive to put and take out the wafers again and again. Anyway any information about electrochemical KOH etch stop will be really wellcomed. Thanks in advance for any comments. Regards Jorge Amírola-Sanz (amirola@eel.upc.es) Asst. Researcher. Universidad Politécnica de Catalunya (SPAIN) Dept. Ingeniería Electrónica.