durusmail: mems-talk: Releasable wafer to wafer bonding
Releasable wafer to wafer bonding
2000-03-28
Releasable wafer to wafer bonding
Francesco Ratti
2000-03-28
Hi,

I need to find a releasable wafer to wafer bonding in order to ship
microstructures.
What are the methods available.
It seems that PB-Sn could be a good method but is difficult to deposit
on the wafer. Is there some more easy material?

thanks


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