We are developping a technique to observe micro tubes, micro chambers, ...machined INSIDE a Silicon wafer to see, just before use, whether they are "blocked-up" or not, and eventually what is the quality of the inner surface of such volumes. Can any one tell us whether other techniques than our (soft X-rays) can do it? IR imaging?, ...Are there any commercial apparatus intended to do (rapidly) quality inspection on such intra- machined devices? Dr. Robert BAPTIST CEA-LETI DMITEC/SIA/ES 17, Avenue des Martyrs 38054 GRENOBLE Cedex FRANCE rbaptist@cea.fr tel: 00 33 (0) 4 76 88 36 01 Fax: 00 33 (0) 4 76 88 94 56 http://www.cea.fr