At 17:52 14/3/0, Sun Kai wrote: >Hello everybody, > Do you have any method about drilling small holes on SiO2 glass? The >diameter of the hole is less then 1mm, and the depth is 500um, the same as >the thickness of glass. It will spend long time, if wet-etching is used, >maybe 1 month. I do not know if mechanical method is OK. > Thanks a lot. > >************************************* >Kai Sun( $BB9!!3. (J) >Dept. of EcoSystem Engineering, >Graduate School of Engineering, >The University of Tokushima, >2-1 Minamijyosanjima, >Tokushima 770-8506, Japan >Tel: 4378 (O) >************************************* > >Hi, Did you try with Laser? > ********************************************************* Sandra Bermejo Broto Semiconductor Devices Group (GDS) Electronic Engineering Department UPC-Campus Nord, C5 Jordi Girona, 1-3 E-08034 Barcelona SPAIN Phone: + 34 93 401 74 81 Fax: + 34 93 401 67 56 e-mail: sandra@eel.upc.es *********************************************************