durusmail: mems-talk: Re: drill small holes on glass
Re: drill small holes on glass
Re: drill small holes on glass
Sandra Bermejo Broto
2000-03-29
At 17:52 14/3/0, Sun Kai wrote:
>Hello everybody,
>      Do you have any method about drilling small holes on SiO2 glass? The
>diameter of the hole is less then 1mm, and the depth is 500um, the same as
>the thickness of glass. It will spend long time, if wet-etching is used,
>maybe 1 month. I do not know if mechanical method is OK.
>     Thanks a lot.
>
>*************************************
>Kai Sun( $BB9!!3. (J)
>Dept. of EcoSystem Engineering,
>Graduate School of Engineering,
>The University of Tokushima,
>2-1 Minamijyosanjima,
>Tokushima 770-8506, Japan
>Tel: 4378 (O)
>*************************************
>
>Hi,
Did you try with Laser?
>

*********************************************************
Sandra Bermejo Broto
Semiconductor Devices Group (GDS)
Electronic Engineering Department
UPC-Campus Nord, C5
Jordi Girona, 1-3
E-08034 Barcelona
SPAIN
Phone: + 34 93 401 74 81
Fax:       + 34 93 401 67 56
e-mail: sandra@eel.upc.es
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