Hi!

I'm developing MEMS devices in a standard CMOS 0.5um process and am looking
for an on-chip circuit which can provide high voltages on the order of 20V
or higher.  One option that I'm aware of is a Dickson voltage multiplier,
but, I'm concerned that breakdown voltages in the process may severely limit
the maximum output potential.  The output will only be driving an
electrostatic capacitive plate (i.e., no current draw).  Does anyone have
any ideas or suggestions that might help me out?