Dear Colleagues,
I will send you a short information to the mail from Karim Sultan (Uni
Heidelberg) about micromechanical KOH etching with electrochemical
etch-stop.
We use since the beginning of the year an automatic wetbench for KOH
etching in sensor technologys (pressure sensors, acceleration sensors
etc.).
The bench works with 12 wafer holder developed by Moritz Design Kassel
(www.moritzdesign.com) and potentiostats for each wafer from AMMT GmbH
(www.ammt.de).
The wafer holder and potentiostats are also available for a single wafer
process and we think the solution is easy to handle and very reliable.
More information you can find at the www or from the following persons:
Hans Moritz     mail:   moritz-design@t-online.de
                phone:  +49 561 5151 81
Jan Lichtenberg jan.lichtenberg@ammt.de
                phone:  +41 32 7205 639
Best regards
Joerg Weber