durusmail: mems-talk: Re: Double-Thickness Wafers
Re: Double-Thickness Wafers
2000-05-05
Re: Double-Thickness Wafers
Dirk Zielke
2000-05-05
> Hello All,
>
> I am hoping to do some bulk micromaching in silicon where the
> structures are up to 450 micrometers deep.  Given that the standard
> wafer thickness is 475 micrometers, this is going to be a problem,
> es> Is anyone aware of a reasonably priced supply of
> double-thickness wafers?  Alternatively, has anyone had success with
> bonding two wafers together?
>
> I would appreciate any input in this matter.
>
> Robert Johnstone


Hi Robert Johnstone,

we have a special wafer service for strength orientated wafers and
wafers with large thicknesses, please see under
www.gemac-chemnitz.de/mst/mst_eng.htm. The price for one wafer is up
to 200 USD. But I feare that  your wafer with thicknesses around 1 mm
are not strange enough to justify  such a price.

With kind regads
Dirk Zielke

Dirk Zielke
GEMAC mbH
Zwickauer Str. 227
09116 Chemnitz
Germany
Tel.: +49 371 3377 131
Fax.: +49 371 3377 272
email: info@gemac-chemnitz.de
http://www.gemac-chemnitz.de (Deutsch)
http://www.gemac-chemnitz.de/mst/mst_eng.htm (English)


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