As usual, the mems@isi.edu mailing list has come through. I would like
to thank all the people who contacted me, there are too many to thank
individually. I will post a summary of the e-mails and my research on
the LPCVD/Furnaces needed for surface micromachining, when I have a
chance to digest the information. (this could take a couple of months)


    Ken Westra
    Director, MicroFab
    University of Alberta