durusmail: mems-talk: Pattern Generator/Mask Making Equipment Needed
Pattern Generator/Mask Making Equipment Needed
2000-05-07
Pattern Generator/Mask Making Equipment Needed
Ken Westra
2000-05-07
 Hello again. I am looking for suppliers of pattern generators/laser
photoplotters for making masks. The specifications we are looking for
are:
1) 5" x 5" masks
2) Near 1 um minimum feature size
3) This being a University, a 'reasonable price' (i.e not millions of
dollars)

  What I have found so far (and have quotes from) are:
Highborn Technology: Rebuilt pattern generators
NEOS Technologies: Laser Photoplotters

Both of these sell machines that do what we want to do at a reasonable
price.
(If you want info on these companies, please contact me)

  I am looking for other companies who make or rebuild similar machines.
I have heard 'rumours' that there are a number of companies making laser
photoplotters for use in PCBs and can be used for wafers. However, I can
only find hints of these companies on the web or in buyers guides.

 Anyone know any others out there ?

    Ken Westra
    Director, MicroFab
    University of Alberta
     kwestra@ualberta.ca


reply