Dear Colleagues- I have an application where I need an anisotropic etch through a 500 micron thick <100> wafer. I don't have Silicon Nitride capability, so I'd like to use an SiO2 pattern mask. Since SiO2 won't stand up to that deep a KOH etch, I'd like to try TMAH. Can anyone provide me with a source for TMAH at a reasonable price? The only thing I've found so far is about $100.00 for 500ml. Thanks, Phil Klauder Voice: 215-646-7400 ext. 2151 Fax: 215-646-3547 E-Mail: PRK@mpco.com