durusmail: mems-talk: TMAH Availability
TMAH Availability
TMAH Availability
PRK@moore-solutions.com
2000-05-10
Dear Colleagues-
        I have an application where I need an anisotropic etch through a 500
micron thick <100> wafer. I don't have Silicon Nitride capability, so I'd
like to use an SiO2 pattern mask. Since SiO2 won't stand up to that deep a
KOH etch, I'd like to try TMAH. Can anyone provide me with a source for TMAH
at a reasonable price? The only thing I've found so far is about $100.00 for
500ml.
        Thanks,

Phil Klauder
Voice:   215-646-7400   ext. 2151
Fax:      215-646-3547
E-Mail:  PRK@mpco.com


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