Dear all, I experienced that the electric resistivity of Cr/Au bi-layer thin-film resistor was drastically increased after a thermal treatment. The process condition was: rough vacuum (~Torr), 380 degC, 2 hours. Cr/Au (thickness=1k/3k angstroms) are on Pyrex substrate (sputtered on). The resulted resistivity was ~20 times higher than un-treated samples. Does any one know what happened to this? I appreciate if somebody can help explain and maybe solve this problem. Thanks and best regards, Merry X'mas and Happy New Year! Quanbo Zou ================================= Dr. Quanbo Zou MEMS Department Institute of Microelectronics 11 Science Park Road Singapore Science Park II Singapore 117685 Tel: 65-7705905(O) 65-2642113(H) Fax: 65-7731915 Email: quanbo@ime.org.sg ================================