durusmail: mems-talk: Commerically availabe XeF2 etching system
Commerically availabe XeF2 etching system
2000-05-18
Commerically availabe XeF2 etching system
Jun Zou
2000-05-18
Hi,

We are very interested in getting a XeF2 etching system suitable for
university lab use.  Is there anyone who can provide me with the vendor
information?

Thanks a lot!

Jun


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