durusmail: mems-talk: Ti flakes on Silicon
Ti flakes on Silicon
2000-05-22
Ti flakes on Silicon
Ami Chand
2000-05-22
Dear MEMS colleagues,

Is it possible to have Ti film of about 1.5 micron, on silicon, in the form of
something like "flakes" ?  Any information in this respect would be highly
appreciated.

Thanking you,


Ami Chand
Veeco Metrology Group


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