Kiyotoka Mori:

You can contact Strata Glass for your silicon nitride
deposition techniques.  There address is as follows:

Strata Glass
958 San leandro Avenue # 100
Mountain View, CA 94043
Phone: 650-988-1700
Fax: 650-988-1739
e-mail:strataglass@earthlink.net

Hope it helps

Ricky Galhotra

--- Kiyotaka Mori  wrote:
>
>
>
> Hi,
>
> Does anyone know where to get low stress(less than
> 100MPa in tension) nonstoichiometric silicon nitride
> wafer?
> Thickness of nitride would be about 0.5 to 1 micron.
>
> Thank you for your help.
>
> mori
>
>
> ==========================================
> Kiyotaka Mori (Graduate Research Assistant)
>
> Dept.of Materials and Nuclear Engineering,
> BLDG.090,
> University of Maryland at College Park,
> College Park, MD 20742
> Tel: 301-405-5229
> Fax: 301-314-9467
> E-mail: mori@eng.umd.edu
> =========================================
>
>


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