A good resource to find out what's being done in the area of planarization
is the IBM patent server (a good resource for a lot of MEMS topics!!) go to
http://www.patents.ibm.com and type planarization in the search engine.
There's a wealth of information on several different techniques. Of course,
how you use the information will be governed by your specific use.


Reid Zeigler
Director, Visual Communications
Merck Research Laboratories


> ----------
> From:         Joachim Knoch[SMTP:knoch@physik.rwth-aachen.de]
> Reply To:     Joachim Knoch;mems-cc@ISI.EDU
> Sent:         Thursday, May 18, 2000 10:13 AM
> To:   MEMS@ISI.EDU
> Subject:      Polishing
>
> Hi everybody,
> does a wet chemical etching for the planarization or polishing of {100}
> planes of silicon wafers with small etching rate exist? I have got the
> problem that after an anisotropic RIE step the resulting vertical {100}
> flanks are too rough. If such an etch exist, please let
> me know what it is and how to use it.
> Any advice would be very helpful.
> Best regards
>
> Joachim Knoch
>
>
>