STS can provide a Commercially available XeF2 etching system.
Contact me if you want more details.
Cheers,
Greg Ortiz
Surface Technology Systems
West Coast Regional Sales Manager
611 Veterans Blvd, #107
Redwood City, CA 94063
Phone 650 569 3655 x16
Pager 1 800 713 9841
Fax 650 569 3663

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> From: Jun Zou 
> To: MEMS@ISI.EDU
> Subject: Commerically availabe XeF2 etching system
> Date: Thursday, May 18, 2000 2:48 PM
>
> Hi,
>
> We are very interested in getting a XeF2 etching system suitable for
> university lab use.  Is there anyone who can provide me with the vendor
> information?
>
> Thanks a lot!
>
> Jun
>
>
>
>