Hello everybody, We are looking for the information about capacitive differential pressure sensor with high sensitivity (10e-3 torr). Does anybody have any idea where we can get the information in detail? The suggestion on following topics will be appreciated. (1) The length and width of the diaphragm is in the order of millimeter and the thickness is in the order of micrometer. Which is the best material for the structure, Si? PolySi? SiN? (2) If we do not want to use bonding, how to fabricate diaphragm and capacitor? (2) Is it necessary to design temprature compensition structure for such sensitivity and how to realize it? Any other noises should be considered for the sensitivity? (3) The capacitance change will be in the order of 10fF. Does anybody have any idea to measure it? Thanks.