To group I was asked to look into the possible RIE etching of YAG ( Yttrium Aluminum Garnet). I wish to use RIE to etch a circular or square mesh pattern either 3 um in diameter or 3um on a side in the case of a square mesh. The etch depth in the YAG should be 3um. Any suggestions, leads, or ideas would be appreicated. -- Keith Jackson Lawrence Berkeley National Laboratory Berkeley,Ca 94720 510-486-6894 voice 510-486-4955 fax