durusmail: mems-talk: CSE
CSE
giuseppe@cumsl.ctr.columbia.edu
2000-06-26
I am looking for a wet chemical etching solution that etches silicon
isotropically and slowly, I mean its have to be controllable, because I
have to etch only 70 nm . If anyone out there know of any
means of doing this, please send me a mail

Thanks,
Giuseppe


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