durusmail: mems-talk: Re: Nitride membranes
Re: Nitride membranes
Re: Nitride membranes
CarlosMastrangelo&ltcarlosm@eecs.umich.edu
1996-01-24
I remeber some papers from MIT about this rupture test. I think they were on
polyamide though. Talk to M. Mehregany at Case Western University.

-C. H. Mastrangelo


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