Good morning, My name is Satish Prabhakaran and I am a research assistant from Thayer School of Engineering, Dartmouth College,New Hampshire. I am trying to polish 3 inch wafers plated with copper. The copper which has to be polished is 80 microns thick. I do not have a machine specifically for polishing wafers but have access to regular polishing machines.. I am trying to find something that will hold my wafer perfectly flat while polishing on an abrasive machine. The resolution in microns is critical. I would be grateful if you could help me with my problem. I would also be grateful if you could also tell me if there are any specific slurries that I should be using for my polishing. Thanking you in anticipation Satish Prabhakaran Thayer School of Engineering Dartmouth College Hanover NH - 03755 USA