Dear colleagues we are looking for suppliers of Plasma CVD equipment for small charges (maybe 10 pieces) of 6" wafers. We know Oxford (it's to small) and Novellus (to big for us). Are there any known suppliers? It could be a cluster tool too. -- Regards Andreas Albrecht CiS Institut fuer Mikrosensorik gGmbH Bereich TZM-Transfer In den Weiden 7 D-99099 Erfurt Tel. +49-(0)361-42051-75 Fax +49-(0)361-42051-76