RE the flaking resist problem. If I were you I'd just do the soft bake for 5-10 minutes. The hard bake of the AZ resist makes it much less flexible. We use AZ 4620 in a similar etch all the time with no problems. We are not staying in for much more than a minute though. Good luck. Jason Tauscher Senior Fabrication Engineer Silicon Designs, Inc. Jason@silicondesigns.com www.silicondesigns.com (425) 391-8329 ----- Original Message ----- From: "Mr. Ritwik Mishra"To: Sent: Saturday, September 16, 2000 9:52 PM Subject: HMDS question > Hi > I am a graduate student at the Mississippi State University, working on my > masters in computer engineering with specialization in fabrication. As > part of my research, I am presently working on a process to remove the > oxide from the back of a wafer using BOE. In order to preserve the front > of the wafer we are treating it with HMDS and resist (either AZ1518 or > SC1827), softbake it at 100C for 45 sec and hardbake at 200C for 2 > min. However during the BOE process after a couple of min the resist is > starting to flake off causing us to remove the wafer from the BOE bath. As > a result we have not been able to remove the oxide from back of the wafer. > We think that we may not be applying HMDS correctly. Do we need a bake > after HMDS application? It would really help us if you could give us > some details on the right process. > > ____________________________________________________________________________ ___ > Mr. Ritwik Mishra > Department of Electrical & Computer Engineering > _______________________________________________ > Research Assistant > Affiliations: > Mississippi Center for Advanced Semiconductor Prototyping (MCASP) > Emerging Material Research Laboratory (EMRL) > P. O. Box 4668 > Mississippi State, MS 39762-4668 > PHONES (662): MCASP 325-2059, 325-8564 FAX: 662-325-2298 > EMRL 325-9476/7 > HOME 320-9393 > ____________________________________________________________________________ ____ > >