durusmail: mems-talk: KOH Etching Recipe
KOH Etching Recipe
KOH Etching Recipe
Behraad Bahreyni
2000-09-26
Hello All,

  Can anybody give me a successfully tested recipe for KOH etching of Silicon
 with minimum SiO2 etching?

  Thanks in advance,
  Behraad Bahreyni

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  Behraad Bahreyni
  Material Research Laboratory
  Department of Electrical and Computer Engineering
  The University of Manitoba
  15 Gillson Street
  Winnipeg, Manitoba
  Canada   R3T 5V6

  Tel:   +1-(204)-2698792

  email: Behraad@ieee.org

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