Hi, Folks, I need make a multilayer structure. The layers are SiO2 (1.5 micron thick), on top of that is Cr/Au ( 0.15 micron thick). Both layers have the same pattern which is 1 micron structure with 1 micron space. How to transfer the pattern? The key thing is how to pattern the metals with this fine features? Thank you in advance. Yahong _________________________________________________________________________ Get Your Private, Free E-mail from MSN Hotmail at http://www.hotmail.com. Share information about yourself, create your own public profile at http://profiles.msn.com.