Dear Colleague,

Au/Cr pattern is formed on top of SiO2 (1um thick) by liftoff process. But I
have to etch SiO2 to get the same pattern as Au. I know Au is not a good
mask for RIE, so I want to put Ni on top of Au so that a Ni/Au/Cr stack will
be the RIE mask. Q: Can Au and Ni be put together? I know Al and Au can not
be put together. Any suggestion is highly appreciated.

Yahong


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