Trying changing your developer recipe. One I use is 40 ml of 400k and 100 ml of water. For about 20 microns thick it takes 2 minutes to develop. I'm exposing on a karl suss aligner with 8 mw/cm^2 bulb for 27 seconds. I get good results with this recipe. Hope this helps Swomitra Mohanty School of Electrical and Computer Engineering Georgia Institute of Technology MiRC-Joseph Pettit Bldg 791 Atlantic Dr Atlanta, GA 30332 e-mail: s.k.mohanty@butter.toast.net