Hello,

I need a photoresist with a comparatively high Young's modulus (>10 GPa)
and with good adhesion to gold layers. The attainable thickness should
be around 5um. Does anyone know whether such a material exists and if
so, what its material properties are ? Thanks in advance.

Best regards

Philipp Schmid
schmid@ebs.e-technik.uni-ulm.de