Hi,

You can try ZnO (er=10-11) which is typically deposited by sputtering. TaO
is also another option.

Check with Handbook of Thin film materials.

Bala

On Mon, 13 Nov 2000, Ying Xu wrote:

> Dear colleagues,
>
> I am looking for some materials that has high dielectric constant (higher
> than SiO2/Nitrid) and also are easy of doing microfabrication.
>
> Thanks in advance for your information.
>
> -Ying Xu
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