Dear Andreas, This is in addition to the reply by Gerold Schröpfer. At CMP, we run 6'' wafers for microsystems (http://cmp.imag.fr). Regards, Bernard COURTOIS Gerold Schröpfer wrote: > Hello Andreas, > > Most of the European foundries are still running 4" wafers and many are > planning not to switch to 6" until they are forced through supply of > equipment for 4" etc. > > To my knowledge the following European foundries handle 6" Si wafers: > > -BOSCH - Reutlingen, Germany > -Colibrys - Neuchatel, Switzerland (foundry spin off from CSEM in January > 2001) > -FhG ISiT - Itzehoe, Germany > -OnStream, Holland > -ST, Italy > and X-Fab in Erfurt that you certainly know well > > There are relatively more in the US the offer 6" wafer capacities. > Unfortunately, almost all of them will not be interested in small volumes > (however it is not always the volume that counts). To my knowledge most R&D > institutions do not offer 6" wafer runs, but generally 4". > > One possibility might be the CMI at the EPFL in Lausanne. They have really > 'nice' cleanroom facilities running on 6". You may contact Prof. Philippe > Renaud (philippe.renaud@epfl.ch). > > If you need more information, your are welcome to contact me. > > Best regards > Gerold > > ---- > Dr. Gerold Schrvpfer > Foundry Program Manager > > COVENTOR Sarl > 3 Avenue du Quebec > ZI de Courtaboeuf > 91140 Villebon sur Yvette > France > > Tel: +33 (0)1 69 29 84 85 > Fax: +33 (0)1 69 29 84 88 > Mobile: +33 (0)6 75 01 43 57 > > COVENTOR: http://www.coventor.com > -----Original Message----- > From: Andreas Albrecht [mailto:aalbrecht@cismst.de] > Sent: Friday, February 16, 2001 5:58 PM > To: MEMS@ISI.EDU > Subject: Si wafer facilities for microsystem fabrication > > Dear colleagues > who knows Si wafer manufacturing facilities in R&D institutes (because > of small to medium volume production) prefered in Germany and could tell > me which > wafer sizes are processed there. > > There is an urgent need for 6" wafer foundry processes. > > Regards > Andreas Albrecht > > Transferzentrum Mikroelektronik e.V. > In den Weiden 7 > D-99099 Erfurt > Tel. +49-(0)361-42051-75 Fax +49-(0)361-42051-76 -- Bernard Courtois TIMA-CMP Tel: +33 4 76 57 46 15 46 avenue Felix Viallet Fax: +33 4 76 47 38 14 38031 Grenoble Cedex-FRANCE Email: Bernard.Courtois@imag.fr http://tima.imag.fr