durusmail: mems-talk: Re: High resistivity DSP wafers
Re: High resistivity DSP wafers
2001-04-16
Re: High resistivity DSP wafers
Kenneth Smith
2001-04-16
If you have a supplier on the Single Side and can arrange the purchase
of the substrates in etched form, I can supply the Double Side
Processing to some very tight specs.
As the High Res Float Zone is limited to only two manufacturers world
wide ( Wacker and SEH), it is more difficult to obtain than is CZ
Silicon.
With Etched wafers from either of these two suppliers, I can supply you
Double Side wafers in the 150mm to the final specs you need with TTV at
< 2 um ( typical <1- 1.5um).

I am working to gain some ingot from one of these suppliers to stock
wafers but they are reluctant to sell ingot and also to other than end
users.

Let me know if you may have an interest in this.
Also, If you are not getting your Single Side Float Zone wafers from the
Direct manufacturer, I can supply some excellent product using your
lapped or etched substrates.

Now, for CZ , I have no problem supply almost any material in SSP or
DSP.

Best Regards,
--
Ken Smith

Kmbh Associates

4968 Charter Road
Rocklin, CA  95765  USA
510-714-5055 Efax- 510 217 4421 or 561 658 6136

High Purity Float Zone and Specialty CZ Silicon  for Power, IR and
Mirror Optics, Optoelectronics, MEMS, SOI, and other Semiconductor
applications. Service in SOI, Polishing SSP and DSP.



"Quenzer, Hans-Joachim" wrote:
>
> Dear MEMS colleagues,
>
> for a project I will need approx. 200 double side polished  6" silicon
> wafers with high resistivity (3000 ohm cm, HRS Wafer, SEMI
> specifications for 6" wafers).
> For single side polished 6" wafer I have already a supplier, but up to
> now I had no luck in finding a supplier for double side polished
> material. Does anyone know a supplier for these wafers?
>
> Any suggestion is appreciated.
>
> Thanks
>
> Hans
>
> _------------------------------------------------
> H.J. Quenzer
> Fraunhofer Institut f|r Siliziumtechnologie
> Fraunhoferstr. 1
> D-25524 Itzehoe
> Tel: +49 4821 17 4524
> Fax: +49 4821 17 4590
> e-mail: quenzer@isit.fhg.de
> Internet: http://www.isit.fhg.de
> ------------------------------------------------


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