metals. To the discussion group, Does anyone have suggestions for cleaning of GaAs wafers with similar effectiveness to the piranha or RCA procedures used on silicon (primarily for organic removal)? In addition, what metals are most appropriate for adhesion layers when depositing contact pads on GaAs. While Ti and Cr are common in the silicon world due to their affinity to oxidized surfaces, the lack of a good native oxide on GaAs surfaces seems to suggest they would be less effective on GaAs. Are any special surface preparation steps required to ensure good adhesion? Any input would be appreciated. Sincerely, Jordan Neysmith _________________________________________________________________________ Get Your Private, Free E-mail from MSN Hotmail at http://www.hotmail.com.