Dear MEMS community,

I would like to know if there is an echant for TaN film (Positive
Photoresist is prefered). The Tantalum Nitride film is the electrode for
my devices, ~2000A. I know one etchant called TNE-12, but this is with
negative resist. Do you have any idea about this?

Thank you very much!!

Weiping

UT Austin