Dear all,
        I would like to hear from any of you who have experience with MEMCAD
software (developed by Coventor Inc.). I am using the MEMCAP module
(version 4.8) for capacitance simulation of MEMS (fixed-fixed and
cantilever beams). Even for the simplest, rectangular,
single-dielectric, parallel-plate devices described in the software
instruction manual, the simulated results are up to 50% higher than
those predicted by the classical formula C = eA/d. Changing the mesh
density/brick type makes very little difference, and I am unable to find
the source of the error. Efforts to resolve this with Coventor technical
support have failed.
        In particular,
- has anyone else come across the same problem with capacitance
simulation using MEMCAD/MEMCAP? Have you managed to solve it?
- I hope to use the software for pull-in analysis of relay switches and
beams. Does any MEMCAD user know how the simulated pull-in values
compare with those predcted by standard pull-in models?

I look forward to receiving any help you can provide. Thanks in advance!

Regards,

Conor O'Mahony.

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Conor O'Mahony
Transducers Group
National Microelectronics Research Centre (NMRC)
Lee Maltings, Prospect Row, Cork, Ireland.

Tel: +353 21 490 4112   E-mail: comahony@nmrc.ie
Fax: +353 21 427 0271   WWW: http://www.nmrc.ie
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